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Trimethylaluminum (TMA)

Molecular Formula: Al(CH3)3

Molecular Weight: 72.09

Physical and Chemical Properties:

A clear and colorless liquid.

Melting Point: 15℃

Boiling Point: 127℃

Density: 0.752g/ml.

Ignites when exposed to air. Reacts violently with alcohol, acid or water of which molecular structure has an active hydrogen group. Miscible with Aliphatic Hydrocarbons, such as Hexane and Heptane, and Aromatic Hydrocarbons, such as Toluene and xylene.

Applications

Used to form Al2O3 passivation layers through PECVD or ALD in photovoltaic Industry. Also used for the deposition of high-k dielectric films, such as Al2O3, in semiconductor process. An important metal-organic source to form Aluminum semiconductors, such as AlAs, AlN, AlP, AlSb, AlGaAs, AlInGaAs, AlInGaP, AlGaN, AlInGaN and AlInGaNP, through MOCVD (Metal Organic Chemical Vapor Deposition) process.

Product Specification

Product 5N 6N Product 5N 6N
Ag,max 0.4 ppm 10 ppb Li,max 0.1 ppm 5 ppb
As,max 0.5 ppm 10 ppb Mg,max 0.05 ppm 10 ppb
B,max 0.4 ppm 10 ppb Mn,max 0.05 ppm 10 ppb
Ba,max 0.1 ppm 10 ppb Na,max 0.5 ppm 20 ppb
Be,max 0.2 ppm 5 ppb Ni,max 0.4 ppm 20 ppb
Bi,max 0.2 ppm 5 ppb Pb,max 1 ppm 10 ppb
Ca,max 0.1 ppm 10 ppb Se,max 1 ppm 10 ppb
Cd,max 0.1 ppm 10 ppb Si,max 1 ppm 20 ppb
Co,max 0.1 ppm 10 ppb Sn,max 0.1 ppm 10 ppb
Cr,max 0.1 ppm 20 ppb Te,max 0.1 ppm 10 ppb
Cu,max 0.15 ppm 20 ppb Ti,max 0.1 ppm 50 ppb
Fe,max 0.1 ppm 50 ppb v,max 0.2 ppm 50 ppb
Ga,max 0.2 ppm 50 ppb Zn,max 0.2 ppm 50 ppb
Ge,max 0.1 ppm 50 ppb Zr,max 0.2 ppm 50 ppb
Hg,max 0.1 ppm 10 ppb Shelf life 36 months
K,max 1 ppm 10 ppb / / /

Packaging Size

Container Material: Stainless Steel EP 316 L

Valve Type: 1/4’’ diaphragm valve.

Valve Material: Stainless Steel 316 L

Valve Connection: 1/4’’ VCR

Net Weight: 14.2 kg, 72 kg and 300 kg

Electronics

Rainer Wolters

Sales Manager
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