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Trimethyl Phosphite (TMP)

Chemical Formula: P(OCH3)3          

Molecular Weight: 124.08

Physical & Chemical Properties

A colorless liquid with pungent odor.

Melting Point: -78 ℃

Boiling Point: 111 to 112 ℃

Density: 1.05 g/mL

Flammable. Insoluble in water. Slowly hydrolyzed into Phosphoric Acid and Methanol when it contacts with water.

Applications

A phosphorus source used to form Phospho-silicate Glass (PSG) and Boro-phospho-silicate Glass (BPSG) layers through deposition process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.

Product Specification

Product 8.5N
Purity (based on metals analyzed), min 99.9999995%
(Al)max 0.7 ppb (Pt)max 0.05 ppb
(Sb)max 0.05 ppb (K)max 0.3 ppb
(As)max 0.5 ppb (Re)max 0.05 ppb
(Ba)max 0.05 ppb (Rh)max 0.05 ppb
(Be)max 0.1 ppb (Rb)max 0.05 ppb
(Bi)max 0.05 ppb (Ag)max 0.3 ppb
(Cd)max 0.1ppb (Na) max 1 ppb
(Ca)max 1 ppb (Sr)max 0.05 ppb
(Ce)max 0.05 ppb (Ta)max 0.05 ppb
(Cr)max 0.1 ppb (Tl)max 0.05 ppb
(Co)max 0.1 ppb (Th)max 0.1 ppb
(Cu)max 0.5 ppb (Sn)max 0.5 ppb
(Ga)max 0.05ppb (Ti)max 0.3 ppb
(Ge)max 0.05 ppb (W )max 0.05 ppb
(Au)max 0.1 ppb (U )max 0.1 ppb
(Hf)max 0.2 ppb (V )max 0.05 ppb
(In)max 0.05 ppb (Zn)max 0.5 ppb
(Ir)max 0.05 ppb (Zr)max 0.1 ppb
(Fe)max 0.5 ppb (B )max 50 ppb
(Pb)max 0.5 ppb Cl-max 50 ppb
(Li)max 0.1 ppb Water max 25 ppm
(Mg)max 0.2 ppb Particles ≥0.µm max 10 p/ml
(Mn)max 0.1 ppb Particles ≥0.3 µm max 7 p/ml
(Hg)max 0.2 ppb Particles ≥0.5 µm max 5 p/ml
(Mo)max 0.1 ppb Particles ≥1.0 µm max 1 p/ml
(Ni)max 0.5 ppb Chroma max 5APHA
(Nb)max 0.05 ppb Assay min 99.99 %
(Pd)max 0.05 ppb Shelf life 12 months

Packaging Size

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill volume: 2 gallons, 5 gallons (19 L),10 gallons.

Electronics

Rainer Wolters

Sales Manager