Trimethyl Phosphite (TMP)
Chemical Formula: P(OCH3)3
Molecular Weight: 124.08
Physical & Chemical Properties
A colorless liquid with pungent odor.
Melting Point: -78 ℃
Boiling Point: 111 to 112 ℃
Density: 1.05 g/mL
Flammable. Insoluble in water. Slowly hydrolyzed into Phosphoric Acid and Methanol when it contacts with water.
A phosphorus source used to form Phospho-silicate Glass (PSG) and Boro-phospho-silicate Glass (BPSG) layers through deposition process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.
Container: Stainless Steel Cylinder
Packaging: Stainless Steel Cabinet
Fill volume: 2 gallons, 5 gallons (19 L),10 gallons.