Electronic grade Trimethyl phosphate (TMPO)
Molecular formula: PO(OCH3)3
Relative molecular mass: 140.08
Chemical & Physical Properties:
Colorless liquid, fruit flavor,
Melting point: -46 C
Boiling point: 197 °C
Density :1.20 g / ml.
Flammable, soluble in water and ether, insoluble in ethanol.
Mainly used for the deposition process in the production of wafer fabrication process to produce phosphorus silicon glass ( PSG) and borophosphosilicate glass (BPSG).
Important electronic chemicals for the manufacture of semiconductor, discrete devices, micro-electro-mechanical systems (MEMS).
Container: stainless steel bottle
Packing: stainless steel locker
Specification: 5 gallons (19 L)