You are here: Electronics > Trimethyl Phosphate (TMPO)

Electronic grade Trimethyl phosphate (TMPO)

Molecular formula: PO(OCH3)3

Relative molecular mass: 140.08

Chemical & Physical Properties:

Colorless liquid, fruit flavor,

Melting point: -46 C

Boiling point: 197 °C

Density :1.20 g / ml.

Flammable, soluble in water and ether, insoluble in ethanol.


Mainly used for the deposition process in the production of wafer fabrication process to produce phosphorus silicon glass ( PSG) and borophosphosilicate glass (BPSG).

Important electronic chemicals for the manufacture of semiconductor, discrete devices, micro-electro-mechanical systems (MEMS).

Product Specification

Product Center

Packaging Size

Container: stainless steel bottle

Packing: stainless steel locker

Specification: 5 gallons (19 L)


Enes Islemecioglu

Sales Manager