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Electronic grade Trimethyl phosphate (TMPO)

Molecular formula: PO(OCH3)3

Relative molecular mass: 140.08

Chemical & Physical Properties:

Colorless liquid, fruit flavor,

Melting point: -46 C

Boiling point: 197 °C

Density :1.20 g / ml.

Flammable, soluble in water and ether, insoluble in ethanol.

Applications

Mainly used for the deposition process in the production of wafer fabrication process to produce phosphorus silicon glass ( PSG) and borophosphosilicate glass (BPSG).

Important electronic chemicals for the manufacture of semiconductor, discrete devices, micro-electro-mechanical systems (MEMS).

Product Specification

Analysis Project Technical indicators
Purity, min 99.9999995%(8.5N)
Chloride, max 50 ppb
Moisture, max  20  ppm
Number of particles ≥ 0.3 µm,max 7  p/ml
Number of particles ≥ 0.5 µm,max 5  p/ml
Main content, min 99.99%
Chroma, max 5APHA

Packaging Size

Container: stainless steel bottle

Packing: stainless steel locker

Specification: 5 gallons (19 L)

Electronics

Enes Islemecioglu

Sales Manager