Trimethyl Phosphate (TMPO)
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Electronic grade Trimethyl phosphate (TMPO)
Molecular formula: PO(OCH3)3
Relative molecular mass: 140.08
Chemical & Physical Properties:
Colorless liquid, fruit flavor,
Melting point: -46 C
Boiling point: 197 °C
Density :1.20 g / ml.
Flammable, soluble in water and ether, insoluble in ethanol.
Applications
Mainly used for the deposition process in the production of wafer fabrication process to produce phosphorus silicon glass ( PSG) and borophosphosilicate glass (BPSG).
Important electronic chemicals for the manufacture of semiconductor, discrete devices, micro-electro-mechanical systems (MEMS).
Product Specification
| Analysis Project | Technical indicators |
| Purity, min | 99.9999995%（8.5N） |
| Chloride, max | 50 ppb |
| Moisture, max | 20 ppm |
| Number of particles ≥ 0.3 µm,max | 7 p/ml |
| Number of particles ≥ 0.5 µm,max | 5 p/ml |
| Main content, min | 99.99% |
| Chroma, max | 5APHA |
Packaging Size
Container: stainless steel bottle
Packing: stainless steel locker
Specification: 5 gallons (19 L)
Electronics
Enes Islemecioglu
Sales Manager