Trimethyl Borate (TMB)

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Trimethyl Borate (TMB)

Chemical Formula: B(OCH₃)₃

Molecular Weight: 103.92

Physical & Chemical Properties

A colorless liquid without significant odor. Stable in normal condition.

Melting Point: -29℃

Density: 0.915g/ml

Boiling Point: 67~68℃. Flammable and reacts violently with oxidants. It can be hydrolyzed into Methanol and Boric Acid. Miscible with organic solvents.

Applications

Mainly used to form Boro-phospho-silicate Glass (BPSG) layer through chemical vapor deposition (CVD) process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.

Product Specification

Product		8.5N
Purity (based on metals analyzed), min		99.9999995%
（Al）max	0.7 ppb	（Pd）max	0.05 ppb
（Sb）max	0.05 ppb	(Pt) max	0.05 ppb
（As）max	0.5 ppb	（K）max	0.2 ppb
（Ba）max	0.1 ppb	（Re）max	0.05 ppb
（Be）max	0.1 ppb	（Rh）max	0.05 ppb
（Bi）max	0.1 ppb	（Rb）max	0.05 ppb
（Cd）max	0.1 ppb	（Ag）max	0.05 ppb
（Ca）max	0.7 ppb	（Na）max	0.5 ppb
（Ce）max	0.05 ppb	（Sr）max	0.1 ppb
（Cr）max	0.1 ppb	（Ta）max	0.05 ppb
（Co）max	0.1 ppb	（Tl）max	0.05 ppb
（Cu）max	0.2 ppb	（Th）max	0.1 ppb
（Ga）max	0.05 ppb	（Sn）max	0.1 ppb
（Ge）max	0.05 ppb	（Ti）max	0.1 ppb
（Au）max	0.1 ppb	（W ）max	0.05 ppb
（Hf）max	0.05 ppb	（U ）max	0.1 ppb
（In）max	0.05 ppb	（V ）max	0.3 ppb
（Ir）max	0.05 ppb	（Zn）max	0.5 ppb
（Fe）max	0.5 ppb	（Zr）max	0.1 ppb
Pb）max	0.1 ppb	Cl- max	50 ppb
（Li）max	0.05 ppb	Water max	20 ppm
（Mg）max	0.3 ppb	Parricles≥0.2µm max	10p/ml
（Mn）max	0.1 ppb	Parricles≥0.3µm max	7 p/ml
（Hg）max	0.1 ppb	Parricles≥0.5µm max	5 p/ml
（Mo）max	0.1 ppb	Parricles≥1.0µm max	1 p/ml
（Ni）max	0.4 ppb	Chroma max	5APHA
（Nb）max	0.05 ppb	Assay min	99.99 %

Shelf Life: 12 months

Packaging Size

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill volume: 2 gallons,5 gallons (19 L),10 gallons

Electronics

Rainer Wolters
Sales Manager

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