Trimethyl Borate (TMB)
Chemical Formula: B(OCH3)3
Molecular Weight: 103.92
Physical & Chemical Properties
A colorless liquid without significant odor. Stable in normal condition.
Melting Point: -29℃
Boiling Point: 67~68℃. Flammable and reacts violently with oxidants. It can be hydrolyzed into Methanol and Boric Acid. Miscible with organic solvents.
Mainly used to form Boro-phospho-silicate Glass (BPSG) layer through chemical vapor deposition (CVD) process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.
Shelf Life: 12 months
Container: Stainless Steel Cylinder
Packaging: Stainless Steel Cabinet
Fill volume: 2 gallons,5 gallons (19 L),10 gallons