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Trimethyl Borate (TMB)

Chemical Formula: B(OCH3)3

Molecular Weight: 103.92

Physical & Chemical Properties

A colorless liquid without significant odor. Stable in normal condition.

Melting Point: -29℃

Density: 0.915g/ml

Boiling Point: 67~68℃. Flammable and reacts violently with oxidants. It can be hydrolyzed into Methanol and Boric Acid. Miscible with organic solvents.

Applications

Mainly used to form Boro-phospho-silicate Glass (BPSG) layer through chemical vapor deposition (CVD) process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.

Product Specification

Product 8.5N
Purity (based on metals analyzed), min 99.9999995%
(Al)max 0.7 ppb (Pd)max 0.05 ppb
(Sb)max 0.05 ppb (Pt) max 0.05 ppb
(As)max 0.5 ppb (K)max 0.2 ppb
(Ba)max 0.1 ppb (Re)max 0.05 ppb
(Be)max 0.1 ppb (Rh)max 0.05 ppb
(Bi)max 0.1 ppb (Rb)max 0.05 ppb
(Cd)max 0.1 ppb (Ag)max 0.05 ppb
(Ca)max 0.7 ppb (Na)max 0.5 ppb
(Ce)max 0.05 ppb (Sr)max 0.1 ppb
(Cr)max 0.1 ppb (Ta)max 0.05 ppb
(Co)max 0.1 ppb (Tl)max 0.05 ppb
(Cu)max 0.2 ppb (Th)max 0.1 ppb
(Ga)max 0.05 ppb (Sn)max 0.1 ppb
(Ge)max 0.05 ppb (Ti)max 0.1 ppb
(Au)max 0.1 ppb (W )max 0.05 ppb
(Hf)max 0.05 ppb (U )max 0.1 ppb
(In)max 0.05 ppb (V )max 0.3 ppb
(Ir)max 0.05 ppb (Zn)max 0.5 ppb
(Fe)max 0.5 ppb (Zr)max 0.1 ppb
Pb)max 0.1 ppb Cl- max 50 ppb
(Li)max 0.05 ppb Water max 20 ppm
(Mg)max 0.3 ppb Parricles≥0.2µm max 10p/ml
(Mn)max 0.1 ppb Parricles≥0.3µm max 7 p/ml
(Hg)max 0.1 ppb Parricles≥0.5µm max 5 p/ml
(Mo)max 0.1 ppb Parricles≥1.0µm max 1 p/ml
(Ni)max 0.4 ppb Chroma max 5APHA
(Nb)max 0.05 ppb Assay min 99.99 %

Shelf Life: 12 months

Packaging Size

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill volume: 2 gallons,5 gallons (19 L),10 gallons

Electronics

Enes Islemecioglu

Sales Manager