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Triethyl Phosphate (TEPO)

Chemical Formula: PO(OC2H5)3

Molecular Weight: 182.15

Physical & Chemical Properties

A clear and colorless liquid. Freely soluble in Ethanol. Soluble in other organic solvents like Ether and Benzene. Soluble in water.

Melting Point: -56.4°C

Boiling Point: 215°C

Density: 1.07kg/L

Stable in normal condition but reacts violently with strong bases and strong oxidants.

Applications

Mainly used to form Phospho-silicate Glass (PSG) and Boro-phospho-silicate Glass (BPSG) layers through deposition process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.

Product Specification

Product 8.5N
Purity (based on metals analyzed), min 99.9999995 %
(Al)max 0.1 ppb (Pt)max 0.05 ppb
(Sb)max 0.1 ppb (K)max 0.2 ppb
(As)max 0.2 ppb (Re)max 0.05 ppb
(Ba)max 0.05 ppb (Rh)max 0.05 ppb
(Be)max 0.05 ppb (Rb)max 0.05 ppb
(Bi)max 0.05 ppb (Ag) max 0.1 ppb
(Cd)max 0.05 ppb (Na)max 0.3 ppb
(Ca)max 0.5 ppb (Sr)max 0.05 ppb
(Ce)max 0.05 ppb (Ta)max 0.05 ppb
(Cr)max 0.05 ppb (Tl)max 0.05 ppb
(Co)max 0.05 ppb (Th)max 0.05 ppb
(Cu)max 0.1 ppb (Sn)max 0.05 ppb
(Ga)max 0.1 ppb (Ti)max 0.05 ppb
(Ge)max 0.05 ppb (W )max 0.05 ppb
(Au)max 0.1 ppb (U )max 0.05 ppb
(Hf)max 0.05 ppb (V) max 0.05 ppb
(In)max 0.05 ppb (Zn)max 0.2 ppb
(Ir)max 0.05 ppb (Zr)max 0.05 ppb
(Fe)max 0.3 ppb (B )max 0.5 ppb
(Pb)max 0.1 ppb Cl- max 50 ppb
(Li)max 0.05 ppb Water max 20 ppm
(Mg)max 0.2 ppb Particle ≥0.2 µm max 10 p/ml
(Mn)max 0.1 ppb Particle ≥0.3 µm max 7 p/ml
(Hg)max 0.1 ppb Particle ≥0.5 µm max 5 p/ml
(Mo)max 0.1 ppb Particle ≥1.0 µm max 1 p/ml
(Ni)max 0.1 ppb Assay min 99.99%
(Nb)max 0.05 ppb Chroma max 5APHA
(Pd)max 0.05 ppb Shelf life 24 months

Product Varieties

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill Volume: 2 gallons,5 gallons (19 L),10 gallons.

Electronics

Enes Islemecioglu

Sales Manager