Triethyl Phosphate (TEPO)

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Triethyl Phosphate (TEPO)

Chemical Formula: PO(OC₂H₅)₃

Molecular Weight: 182.15

Physical & Chemical Properties

A clear and colorless liquid. Freely soluble in Ethanol. Soluble in other organic solvents like Ether and Benzene. Soluble in water.

Melting Point: -56.4°C

Boiling Point: 215°C

Density: 1.07kg/L

Stable in normal condition but reacts violently with strong bases and strong oxidants.

Applications

Mainly used to form Phospho-silicate Glass (PSG) and Boro-phospho-silicate Glass (BPSG) layers through deposition process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.

Product Specification

Product		8.5N
Purity (based on metals analyzed), min		99.9999995 %
（Al）max	0.1 ppb	（Pt）max	0.05 ppb
（Sb）max	0.1 ppb	（K）max	0.2 ppb
（As）max	0.2 ppb	（Re）max	0.05 ppb
（Ba）max	0.05 ppb	（Rh）max	0.05 ppb
（Be）max	0.05 ppb	（Rb）max	0.05 ppb
（Bi）max	0.05 ppb	(Ag) max	0.1 ppb
（Cd）max	0.05 ppb	（Na）max	0.3 ppb
（Ca）max	0.5 ppb	（Sr）max	0.05 ppb
（Ce）max	0.05 ppb	（Ta）max	0.05 ppb
（Cr）max	0.05 ppb	（Tl）max	0.05 ppb
（Co）max	0.05 ppb	（Th）max	0.05 ppb
（Cu）max	0.1 ppb	（Sn）max	0.05 ppb
（Ga）max	0.1 ppb	（Ti）max	0.05 ppb
（Ge）max	0.05 ppb	（W ）max	0.05 ppb
（Au）max	0.1 ppb	（U ）max	0.05 ppb
（Hf）max	0.05 ppb	(V) max	0.05 ppb
（In）max	0.05 ppb	（Zn）max	0.2 ppb
（Ir）max	0.05 ppb	（Zr）max	0.05 ppb
（Fe）max	0.3 ppb	（B ）max	0.5 ppb
（Pb）max	0.1 ppb	Cl- max	50 ppb
（Li）max	0.05 ppb	Water max	20 ppm
（Mg）max	0.2 ppb	Particle ≥0.2 µm max	10 p/ml
（Mn）max	0.1 ppb	Particle ≥0.3 µm max	7 p/ml
（Hg）max	0.1 ppb	Particle ≥0.5 µm max	5 p/ml
（Mo）max	0.1 ppb	Particle ≥1.0 µm max	1 p/ml
（Ni）max	0.1 ppb	Assay min	99.99%
（Nb）max	0.05 ppb	Chroma max	5APHA
（Pd）max	0.05 ppb	Shelf life	24 months

Product Varieties

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill Volume: 2 gallons,5 gallons (19 L),10 gallons.

Electronics

Rainer Wolters
Sales Manager

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