Triethyl Borate (TEB)

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Triethyl Borate (TEB)

Chemical Formula: B(OC₂H₅)₃

Molecular Weight: 145.99

Physical & Chemical Properties

A clear and colorless liquid with mild odor and remarkable thermal stability.

Density: 0.86 Kg/L

Melting Point: -84.8°C

Boiling Point: 118°C

It has good hygroscopicity and can be decomposed into Ethanol and Boric Acid in water. Flammable.

Applications

Mainly used to form Boro-phospho-silicate Glass (BPSG) layers through deposition process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.

Product Specification

Product		8.5N
Purity (based on metals analyzed), min		99.9999995 %
（Al）max	0.2 ppb	（Ni）max	0.2 ppb
（Ag）max	0.05 ppb	（Pb）max	0.1 ppb
（As）max	0.1 ppb	（Pd）max	0.05 ppb
（Au）max	0.05 ppb	（Pt）max	0.05 ppb
（Ba）max	0.1 ppb	（Rb）max	0.05 ppb
（Be）max	0.05 ppb	（Re）max	0.05 ppb
（Bi）max	0.05 ppb	（Rh）max	0.05 ppb
（Ca）max	0.8 ppb	（Sb）max	0.05 ppb
（Cd）max	0.05 ppb	（Sn）max	0.05 ppb
（Ce）max	0.05 ppb	（Sr）max	0.05 ppb
（Co）max	0.05 ppb	（Ta）max	0.05 ppb
（Cu）max	0.1 ppb	（Th）max	0.05 ppb
（Cr）max	0.1 ppb	（Ti）max	0.05 ppb
（Fe）max	0.3 ppb	（Tl）max	0.05 ppb
（Ga）max	0.05 ppb	（U ）max	0.05 ppb
（Ge）max	0.05 ppb	（V ）max	0.05 ppb
（Hf）max	0.05 ppb	（W ）max	0.05 ppb
（Hg）max	0.1 ppb	（Zn）max	0.05 ppb
（In）max	0.05 ppb	（Zr）max	0.05 ppb
（Ir）max	0.05 ppb	Cl- max	50ppb
（ K）max	0.2 ppb	Water max	20ppm
（Li）max	0.05 ppb	Particle ≥0.2 µm max	10 p/ml
（Mg）max	0.2 ppb	Particle ≥0.3 µm max	7 p/ml
（Mn）max	0.1 ppb	Particle ≥ 0.5µm max	5 p/ml
（Mo）max	0.05 ppb	Particle ≥ 1.0µm max	1 p/ml
（Na）max	0.5 ppb	Assay min	99.99%
（Nb）max	0.05 ppb	Chroma max	5APHA

Shelf Life: 24 months

Packaging Size

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill Volume: 2 gallons,5 gallons (19 L),10 gallons.

Electronics

Rainer Wolters
Sales Manager

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