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Tetraethyl Orthosilicate (TEOS)

Chemical Formula: Si(C2H5O)4

Molecular Weight: 208.33

Physical & Chemical Properties

Appearance: apparently colorless liquid

Melting point: -77 ℃

Boiling point: 169 ℃

Relative density: 0.9346 g/ml

Stable in air. Slightly soluble in water. Hydrolyze very slowly in pure water. Acid or base can speed up its hydrolyzation.

Applications

Primarily used in the chemical vapor deposition (CVD) process of wafer fab to form Silicon Dioxide (SiO2) film.

An important electronic chemical needed for the manufacturing of semiconductors, discrete devices and MEMS products.

Product Specification

Product 8N
Purity (based on metals analyzed), min 99.999999%
(Al)max 0.2 ppb (Mn)max 0.1 ppb
(Ag)max 0.1 ppb (Mo)max 0.1 ppb
(As)max 0.4 ppb (Na)max 0.5 ppb
(Au)max 0.1 ppb (Nb)max 0.1 ppb
(B)max 0.5 ppb (Ni)max 0.2 ppb
(Ba)max 0.1 ppb (Pb)max 0.1 ppb
(Be)max 0.1 ppb (Sb)max 0.1 ppb
(Bi)max 0.1 ppb (Sn)max 0.2 ppb
(Ca)max 0.5 ppb (Sr)max 0.1 ppb
(Cd)ma 0.1 ppb (Th)max 0.1 ppb
(Ti)max 0.1 ppb (W)max 0.1 ppb
(U)max 0.1 ppb (Zn)max 0.2 ppb
(V)max 0.1 ppb Cl- max 0.5ppm
(Co)max 0.4 ppb Water max 5 ppm
(Cu)max 0.2 ppb Ethanol max 3 ppm
(Cr)max 0.2 ppb Parricles≥0.1µm max 50 p/ml
(Fe)max 0.2 ppb Parricles≥0.2µm max 30 p/ml
(Zr)max 0.1 ppb Parricles≥0.3µm max 20 p/ml
(Ga)max 0.4 ppb Parricles≥0.5µm max 10 p/ml
(Hg)max 0.3 ppb Parricles≥1.0µm max 3 p/ml
(K)max 0.2 ppb Chroma max 10 APHA
(Li)max 0.1 ppb Assay min 99.99%
(Mg)max 0.5 ppb Shelf life 24 months

 

 

Product 9N
Purity (based on metals   analyzed), min 99.9999999%
(Al)max 0.1 ppb (Pb)max 0.1   ppb
(Ag)max 0.1 ppb (Pd)max 0.05 ppb
(As) max 0.1 ppb (Pt)max 0.05 ppb
(Au)max 0.1 ppb (Rb)max 0.05 ppb
(B)max 0.5 ppb (Re)max 0.05 ppb
(Ba) max 0.1 ppb (Rh)max 0.05 ppb
(Be)max 0.05 ppb (Sb)max 0.05 ppb
(Bi)max 0.05 ppb (Sn)max 0.05 ppb
(Ca)max 0.2 ppb (Sr)max 0.05 ppb
(Cd)max 0.05 ppb (Ta)max 0.05 ppb
(Ce)max 0.05 ppb (Th) max 0.05 ppb
(Co)max 0.1 ppb (Ti)max 0.05 ppb
(Cu)max 0.1 ppb (Tl)max 0.05 ppb
(Cr)max 0.1 ppb (U)max 0.05 ppb
(Fe)max 0.2 ppb (V)max 0.05 ppb
(Ga)max 0.05 ppb (W)max 0.05 ppb
(Ge)max 0.05 ppb (Zn)max 0.1 ppb
(Hf)max 0.05 ppb (Zr)max 0.05 ppb
(Hg)max 0.05 ppb Cl- max 50 ppb
(In)max 0.05 ppb Water max   5 ppm
(Ir)max 0.05 ppb Ethanol max   3 ppm
(K)max 0.2 ppb Parricles ≥0.1µm max 50 p/ml
(Li)max 0.05 ppb Parricles ≥0.2µm max 10 p/ml
(Mg)max 0.1 ppb Parricles ≥0.3µm max 7 p/ml
(Mn)max 0.1 ppb Parricles ≥0.5µm max 5 p/ml
(Mo)max 0.05 ppb Parricles ≥1.0µm max 1p/ml
(Na)max 0.1 ppb Assay min 99.99%
(Nb)max 0.1 ppb Chroma max 10APHA
(Ni)max 0.2 ppb Shelf life 24 months

Packaging Size

Container: Stainless Steel Cylinder.

Packaging: Stainless Steel Cabinet.

Fill volume: 2 gallons,5 gallons (19 L),10 gallons, 200 L.

Electronics

Enes Islemecioglu

Sales Manager