Phosphorus Oxychloride (POCl₃)

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Chemical Formula: POCl₃

Molecular Weight: 153.33

Physical & Chemical Properties

A colorless, clear and volatile liquid with strong pungent odor. Hydrolyzed in humid air to make phosphoric acid and hydrochloric acid.

Melting Point: 1.25 ℃

Boiling Point: 105.1 ℃

Density: 1.675 kg/L

Heat of Vaporization: 33.7 kJ/mol

Chemically stable below 300℃. Explodes when it contacts with large quantities of water. Toxic and corrosive.

Applications

Mainly used for N-type diffusion doping in wafer fabrication.

A liquid phosphorus source used in a broad range of applications including IC, solar cells, optical fiber preform and discrete devices.

An electronic material needed for wafer process and also the raw material of high purity Phosphate Ester.

Product	6N	7N	Product	6N	7N
Al, max	40 ppb	5 ppb	Li, max	10 ppb	6 ppb
As, max	30 ppb	6 ppb	Mg, max	20 ppb	5 ppb
Ag, max	1 ppb	1 ppb	Mn, max	30 ppb	1 ppb
Au, max	1 ppb	1 ppb	Na, max	10 ppb	5 ppb
Ba, max	20 ppb	1 ppb	Nb, max	2 ppb	1 ppb
Bi, max	10 ppb	1 ppb	Ni, max	20 ppb	1 ppb
Ca, max	30 ppb	5 ppb	Pb, max	10 ppb	3 ppb
Co, max	20 ppb	1 ppb	Sn, max	5 ppb	1 ppb
Cu, max	20 ppb	2 ppb	Sr, max	5 ppb	1 ppb
Cr, max	20 ppb	1 ppb	Ti, max	5 ppb	2 ppb
Fe, max	40 ppb	5 ppb	Zn, max	5 ppb	1 ppb
Ga, max	1 ppb	1 ppb	Assay, min	99.9%	99.9%
Hg, max	10 ppb	5 ppb	Chroma, max	5 APHA	5 APHA
K, max	30 ppb	3 ppb	Particles/ml ≥0.3μm, max	50	50

Container: High purity quartz bubbler. Coated high purity quartz bubbler.

Packaging: PVC plastic bag + Polyfoam + Drum.

Fill volume: 500 ml, 1000 ml, 1500 ml,4.2L,5L or Customized.

Rainer Wolters
Sales Manager