Phosphorus Oxychloride (POCl3)
Chemical Formula: POCl3
Molecular Weight: 153.33
Physical & Chemical Properties
A colorless, clear and volatile liquid with strong pungent odor. Hydrolyzed in humid air to make phosphoric acid and hydrochloric acid.
Melting Point: 1.25 ℃
Boiling Point: 105.1 ℃
Density: 1.675 kg/L
Heat of Vaporization: 33.7 kJ/mol
Chemically stable below 300℃. Explodes when it contacts with large quantities of water. Toxic and corrosive.
Mainly used for N-type diffusion doping in wafer fabrication.
A liquid phosphorus source used in a broad range of applications including IC, solar cells, optical fiber preform and discrete devices.
An electronic material needed for wafer process and also the raw material of high purity Phosphate Ester.
Container: High purity quartz bubbler. Coated high purity quartz bubbler.
Packaging: PVC plastic bag + Polyfoam + Drum.
Fill volume: 500 ml, 1000 ml, 1500 ml,4.2L,5L or Customized.