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Phosphorus Oxychloride (POCl3)

Chemical Formula: POCl3

Molecular Weight: 153.33

Physical & Chemical Properties

A colorless, clear and volatile liquid with strong pungent odor. Hydrolyzed in humid air to make phosphoric acid and hydrochloric acid.

Melting Point: 1.25 ℃

Boiling Point: 105.1 ℃

Density: 1.675 kg/L

Heat of Vaporization: 33.7 kJ/mol

Chemically stable below 300℃. Explodes when it contacts with large quantities of water. Toxic and corrosive.

Applications

Mainly used for N-type diffusion doping in wafer fabrication.

A liquid phosphorus source used in a broad range of applications including IC, solar cells, optical fiber preform and discrete devices.

An electronic material needed for wafer process and also the raw material of high purity Phosphate Ester.

Product Specification

Product 6N 7N Product 6N 7N
Al, max 40 ppb 5 ppb Li, max 10 ppb 6 ppb
As, max 30 ppb 6 ppb Mg, max 20 ppb 5 ppb
Ag, max 1 ppb 1 ppb Mn, max 30 ppb 1 ppb
Au, max 1 ppb 1 ppb Na, max 10 ppb 5 ppb
Ba, max 20 ppb 1 ppb Nb, max 2 ppb 1 ppb
Bi, max 10 ppb 1 ppb Ni, max 20 ppb 1 ppb
Ca, max 30 ppb 5 ppb Pb, max 10 ppb 3 ppb
Co, max 20 ppb 1 ppb Sn, max 5 ppb 1 ppb
Cu, max 20 ppb 2 ppb Sr, max 5 ppb 1 ppb
Cr, max 20 ppb 1 ppb Ti, max 5 ppb 2 ppb
Fe, max 40 ppb 5 ppb Zn, max 5 ppb 1 ppb
Ga, max 1 ppb 1 ppb Assay, min 99.9% 99.9%
Hg, max 10 ppb 5 ppb Chroma, max 5 APHA 5 APHA
K, max 30 ppb 3 ppb Particles/ml ≥0.3μm, max 50 50

Packaging Size

Container: High purity quartz bubbler. Coated high purity quartz bubbler.

Packaging: PVC plastic bag + Polyfoam + Drum.

Fill volume: 500 ml, 1000 ml, 1500 ml,4.2L,5L or Customized.

Electronics

Enes Islemecioglu

Sales Manager