High-Resolution Dry Film Photoresist (Negative Tone)
Precision patterning material for advanced lithographic applications.
Enables high-resolution imaging in semiconductor and MEMS fabrication using negative-tone photoresist films.
Reliable Negative-Tone Imaging for MEMS and Semiconductor Lithography
High-resolution dry film photoresists (negative tone) are light-sensitive materials designed for the formation of durable, high-definition patterns on substrates used in microfabrication. By crosslinking upon UV exposure, these photoresists create negative-tone patterns that remain on the substrate after development, making them ideal for precise and stable microstructures.
NAGASE offers four series of negative-tone dry film photoresists optimized for laminating applications. They are widely used in semiconductor manufacturing and MEMS fabrication, where excellent resolution, adhesion, and process compatibility are essential.
NAGASE supplies high-resolution dry film photoresists with negative tone globally for advanced semiconductor and MEMS applications – backed by technical expertise and comprehensive logistics support.
Applications
Negative-tone dry film photoresists are used to create high-resolution, durable patterns for microfabrication processes.
- Semiconductor lithography – Patterning of ICs, wafers, and interconnect layers
- MEMS device fabrication – Structuring of sensors, actuators, and microcomponents
- Advanced packaging – Redistribution layers and package-level patterning
- Electroplating masks – High-precision masking for copper or gold deposition
- Etching and micromachining – High-resolution resist patterns for selective material removal
Features
These negative-tone dry film photoresists offer excellent resolution, adhesion, and process stability for demanding imaging applications.
- High-resolution patterning – Enables sub-micron feature definition for microfabrication
- Excellent adhesion – Strong bonding to various substrate types including metals and silicon
- Thermal and chemical resistance – Suitable for harsh process conditions
- Dry lamination capability – Easy and consistent application via laminator equipment
- Multiple product series – Tailored properties to suit different exposure and development requirements
Additional Information
- Long pot life even at room temperature
- Flux compatibility
- Low curing temperature, Short curing time
- Additional modification e.g.: snap cure, thermal conductivity, reworkability
- Meets the requirements of RoHS and EU REACH